Ultrathin Diamond-like Carbon Films Deposited by Filtered Carbon Vacuum Arcs
نویسندگان
چکیده
December1999 Symposium Paper May 2000 final, revised version for IEEE Transactions on Plasma Science: July 13, 2001 This work was supported through the CRADA BG98-084(01) of the ER-LTR Program of the U.S. Department of Energy, under Contract No. DE-AC03-76SF00098, by CVC-Veeco, Inc., the CRADA Industrial Partner, by the National Storage Industry Consortium (NSIC), and the Computer Mechanics Laboratory at the University of California at
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